A low-cost acoustic microsensor based system in package for air quality monitoring

7Citations
Citations of this article
22Readers
Mendeley users who have this article in their library.
Get full text

Abstract

In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates. The hybrid particle sensing system consists of a zinc oxide (ZnO) based solidly mounted resonator (SMR) device interfaced to a CMOS application-specific integrated circuit (ASIC) chip. Air is drawn into a virtual impactor where PM2.5 particles are separated and then deposited onto the SMR surface. The mass loading due to the fine particles is measured as a shift in the resonant frequency of the SMR working at 894 MHz. Experimental results performed in both laboratory conditions and real outdoor environment showed that the hybrid system is capable of detecting fine particles with a sensitivity of 7.5 kHz per μg/m3. This system is used as a basis towards a fully integrated portable smart particle sensor based on CMOS-SMR devices for the continuous, real-time and low-cost monitoring of airborne particulate matter.

References Powered by Scopus

Individual air-borne particle mass measurement using high-frequency micromechanical resonators

69Citations
N/AReaders
Get full text

An array of monolithic FBAR-CMOS oscillators for mass-sensing applications

5Citations
N/AReaders
Get full text

Cited by Powered by Scopus

Microfluidic and micromachined/MEMS devices for separation, discrimination and detection of airborne particles for pollution monitoring

24Citations
N/AReaders
Get full text

Lab-on-a-Chip Platforms for Airborne Particulate Matter Applications: A Review of Current Perspectives

12Citations
N/AReaders
Get full text

Thermally Modulated CMOS-Compatible Particle Sensor for Air Quality Monitoring

5Citations
N/AReaders
Get full text

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Cite

CITATION STYLE

APA

Thomas, S., Cole, M., Villa-Lopez, F. H., Gardner, J. W., Peters, J., & Theunis, J. (2016). A low-cost acoustic microsensor based system in package for air quality monitoring. In Proceedings of IEEE Sensors (Vol. 0). Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1109/ICSENS.2016.7808872

Readers' Seniority

Tooltip

PhD / Post grad / Masters / Doc 11

73%

Professor / Associate Prof. 2

13%

Researcher 2

13%

Readers' Discipline

Tooltip

Engineering 9

69%

Computer Science 2

15%

Design 1

8%

Chemistry 1

8%

Save time finding and organizing research with Mendeley

Sign up for free