Advancement in research of smart metals and materials used for fabrication of “MEMS” components-review

Abstract

Even, numerous polymers and composites of materials developed so far, the adopting them in MEMS components is still challenging.The mechanical properties, electrical properties of those materials varies independently. In addition to, the components used in MEMS have micro level dimensions and different specifications. Tedious work and concentration is need for Choosing of suitable metals and materials for specific application while fabricating MEMS Components. In this survey paper,advancement in research for finding the metals and materials used for fabrication MEMS parts and components, metal micro films fabrication and metal conductors, structural parts of micro sensors and micro actuators magnetic actuators for micro-devices, are try to explore to researchers. Various research papers related to MEMS material were collected from the literature. The name of metal and materials are mentioned and described briefly in an order. The MEMS fabrication methods are not discussed.