Abstract
An E / O phase modulator may include a waveguide having an insulating substrate , a single - crystal silicon strip and a polysilicon strip of a same thickness and doped with oppo site conductivity types above the insulating substrate , and an insulating interface layer between the single - crystal silicon strip and polysilicon strip . Each of the single - crystal silicon strip and polysilicon strip may be laterally continued by a respective extension , and a respective electrical contact coupled to each extension .
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CITATION STYLE
Tao, Y. (2019). Integrated Electro-Optics Modulator. In Modulation in Electronics and Telecommunications [Working Title]. IntechOpen. https://doi.org/10.5772/intechopen.88078