Accuracy: The Next Opportunity for MEMS

Abstract

Microelectromechanical systems (MEMS) experienced a huge growth in recent years, thanks to the widespread adoption in personal electronics. Driven by demanding consumer applications, the accuracy of MEMS-based devices is now in line with the requirements of industrial and automotive markets, thus opening new business opportunities. STMicroelectronics portfolio of MEMS devices leverages the company 20 years-long experience to provide tailored solutions that balance performance trade-offs to best address different market segments. This paper presents the main opportunities for MEMS-based devices in the fields of smart industry and smart driving and discusses the key parameters that qualify high-accuracy sensors: noise, stability and tolerance. The ASM330LHH, a 6{\texttimes} Inertial Measurement Unit for automotive applications, is presented as the basis for discussing main IC design guidelines to obtain superior performance.