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Journal Article

A Mask Able to Make Nano-Meter-Order Line-and-Space for Fast Atom Beam Manufacturing

  • SOEDA T
  • KAMIYA D
  • HORIE M
The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP (2002) 2002(0) 84-85
DOI: 10.1299/jsmeiip.2002.84
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SOEDA, T., KAMIYA, D., & HORIE, M. (2002). A Mask Able to Make Nano-Meter-Order Line-and-Space for Fast Atom Beam Manufacturing. The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP, 2002(0), 84–85. https://doi.org/10.1299/jsmeiip.2002.84

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