Micromechanical Bolometers for Subterahertz Detection at Room Temperature

Abstract

Fast room-temperature imaging at terahertz (THz) and subterahertz (sub-THz) frequencies is an interesting technique that could unleash the full potential of plenty of applications in security, healthcare, and industrial production. In this Letter, we introduce micromechanical bolometers based on silicon nitride trampoline membranes as broad-range detectors down to sub-THz frequencies. They show, at the longest wavelengths, room-temperature noise-equivalent powers comparable to those of state-of-the-art commercial devices (∼100 pW Hz-1/2), which, along with the good operation speed and the easy, large-scale fabrication process, could make the trampoline membrane the next candidate for cheap room-temperature THz imaging and related applications.