CITATION STYLE
Shibahara, M., Yamamoto, Y., Yamamura, K., Sano, Y., Endo, K., & Mori, Y. (2006). Development of Ultra Precision Finishing Method for Quartz Crystal Wafer Utilizing Atmospheric Pressure Plasma. In Towards Synthesis of Micro-/Nano-systems (pp. 233–237). Springer London. https://doi.org/10.1007/1-84628-559-3_39
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