Excimer laser polymer ablation: formation of positively charged surfaces and its application into the metallization of polymer films

Abstract

Excimer laser ablation of poly(ethylene terephthalate), polyimide, and polyethersulfone films has been investigated by measuring the surface potential on the films and the velocity distribution in ionic fragments. Upon the irradiation with XeCl or KrF excimer laser in air, the surface potential of the films charged from neutral to positive. By the measurement of velocity distribution in ionic fragments with a Faraday cup assembly, it turned out that the change into a positive potential on the films was mainly caused by the redeposition of cationic fragments onto the surface of the ablated area. The change in surface potential was applied into the area-selective electroless plating (chemical plating) of copper or nickel on the ablated surface of the films. © 1993.