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Journal ArticleOPEN ACCESS

Trends and Applications of MEMS

Journal of the Institute of Electrical Engineers of Japan (2009) 129(5) 307-310
DOI: 10.1541/ieejjournal.129.307
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Trends and Applications of MEMS. (2009). Journal of the Institute of Electrical Engineers of Japan, 129(5), 307–310. https://doi.org/10.1541/ieejjournal.129.307

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