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The Radio-frequency Plasma Decompose Chlorofluorocabons.

The Journal of The Institute of Electrical Engineers of Japan (1994) 114(11) 719-722
DOI: 10.1541/ieejjournal.114.719
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The Radio-frequency Plasma Decompose Chlorofluorocabons. (1994). The Journal of The Institute of Electrical Engineers of Japan, 114(11), 719–722. https://doi.org/10.1541/ieejjournal.114.719

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