Synthesis of Buried Dielectric Layers in Silicon by Ion Implantation

Wilson, I. H. (1988). Synthesis of Buried Dielectric Layers in Silicon by Ion Implantation. In The Physics and Technology of Amorphous SiO2 (pp. 487–516). Springer US. https://doi.org/10.1007/978-1-4613-1031-0_62