FEM Simulation of the Thermo-Mechanical Behaviors of the Micro V-shaped Beams

Abstract

Calculation and simulation for the thermo-mechanical behavior of micro V-shaped beams using ANSYS Workbench software are introduced in this paper. The heat transfer model of the V-beam is built to determine the displacement of the mechanical system with different temperatures supplied, taking account of the dependence of material properties on temperature changes. The theoretical calculations for the deformation and the actuation force are carried out thanks to the formulas of the expansion of V-beams when the temperature is supplied to the whole system. Thermal simulation results were also performed using ANSYS Workbench software to compare with the theoretical calculation for the mechanical response when the temperature formed from the supplying the voltage between electrodes. These results are the basis for the design of micro V-shaped structures to be applied in later micro-motor systems.