Introduction to electrical 3D integration

Abstract

In 1965, Gordon E. Moore submitted his prediction, now known as Moore’s Law, on the exponential growth of transistor density in an integrated circuit to the semiconductor industry. It is not clear whether this prediction has become a self-fulfilling prophecy, but it certainly defined a guideline for the entire industrial sector associated with microelectronics, and the industry has kept a steady pace of miniaturization, doubling the device density every 18-24 months.