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A novel suspended gate MOSFET pressure sensor

  • Segovia J
  • Fernandez-Bolanos M
  • Quero J
Smart Sensors, Actuators, and MEMS II (2005) 5836 363-370
DOI: 10.1117/12.608718
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Segovia, J. A., Fernandez-Bolanos, M., & Quero, J. M. (2005). A novel suspended gate MOSFET pressure sensor. In Smart Sensors, Actuators, and MEMS II (Vol. 5836, pp. 363–370). SPIE. https://doi.org/10.1117/12.608718

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