CITATION STYLE
Józwik, M., Kujawinska, M., Zeitner, U. D., & Haugholt, K. H. (2009). Optical design of a DOE-based laser interferometer for inspection of MEMS/MOEMS. In Fringe 2009 - 6th International Workshop on Advanced Optical Metrology (pp. 485–488). Springer Science and Business Media Deutschland GmbH. https://doi.org/10.1007/978-3-642-03051-2_80
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