A novel design methodology for mems micro cantilever triode switch

Abstract

This paper describes a novel methodology for designing a MEMS (micro electromechanical systems) triode switch made up of a cantilever for a given set of performance parameters viz minimum pull-in voltage, on-time and off-time. These performance parameters are associated with MEMS triode switch structural parameters such as length, width, thickness, cross sectional area, initial gap between the electrodes and are found using MATLAB. A relational database using MS Access is created with the performance parameters and corresponding structural parameters. The switch(es) which satisfy the given specifications are retrieved based on data mining principle. An algorithm is written for mining the data from the database. A software package is developed for this algorithm in JAVA language for data mining. The designer can choose the switch(es) as per design constraints. This approach reduces the design cycle time of the MEMS triode switches.