Abstract
Thin nanolayered coatings composed of the consequent alternation of multi-element (TiAlSiY)N and binary MoN layers were deposited by the cathodic arc deposition. The elemental composition, phase structure, microstructure and mechanical properties of the coatings were studied by well-established experimental methods: SEM, EDS, XRD, TEM, and microindentation. It was found that (TiAlSiY)N/MoN coatings had a complex chemical composition, which preferably consisted of a mixture of Ti, Al and Si nitrides. The preferential crystallographic orientation along (200) plane was found for all samples. TEM results showed that investigated coatings composed of ununiform nano-scale multilayered structures with modulation periods ranged from 20 to 32 nm. The maximum microhardness of the deposited coatings reached 1087HV0.1.
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CITATION STYLE
Maksakova, O., Pogrebnjak, A. D., Bondar, O., Stolbovoy, V., Kravchenko, Y., Beresnev, V., & Zukowski, P. (2020). Features of the Microstructure of Multilayered (TiAlSiY)N/MoN Coatings Prepared by CA-PVD and Their Influence on Mechanical Properties. In Springer Proceedings in Physics (Vol. 240, pp. 105–116). Springer. https://doi.org/10.1007/978-981-15-1742-6_11
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