Phase separation study of annealed SiOx films through energy filtered scanning transmission electron microscope

  • Nicotra G
  • Bongiorno C
  • Spinella C
  • et al.
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Nicotra, G., Bongiorno, C., Spinella, C., & Rimini, E. (2009). Phase separation study of annealed SiOx films through energy filtered scanning transmission electron microscope. In EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany (pp. 415–416). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-540-85156-1_208

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