Tracking control for nanopositioning systems

Abstract

The performance of nanopositioning systems is greatly affected by their mechanical dynamics, and for piezo-actuated designs, induced structural vibration, hysteresis, and creep can drastically limit positioning precision. Therefore, tracking control, both feedback and feedforward control, plays an important role in achieving high-performance operation, especially at high operating frequencies. This chapter reviews popular feedback and feedforward control techniques for nanopositioning systems. First, the effects of vibration, hysteresis, and creep are described, where simple methods traditionally employed to avoid these effects are discussed. Second, various models for nanopositioning systems for control system design, simulation, and synthesis are presented. Finally, popular feedback and feedforward controllers to handle vibration, hysteresis, and creep are presented, along with experimental results.