Fabrication of planar microelectrodes based on bulk silicon micromachining

Abstract

The design, fabrication, and basic characterization of planar microelectrodes are reported in this work. Microelectrodes were fabricated using Microelectronics techniques and silicon bulk micromachining. A matrix-like arrangement with 22 electrodes was developed for the purpose of culture cell planned for samples from vagina and urinary organs. Planar electrodes were defined with 40x40 squared-microns area using 200 nanometers-thick of titanium films. The electrode arrangement was distributed in a chip measuring 4x4 millimeters-area. In the central zone of the chip, a two level cavity was bulk-micromachined were the cells/electrodes are to be confined. The complete electrode arrangement was covered using a thin silicon nitride film. © 2013 Springer.