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Laboratory-size three-dimensional water-window X-ray microscope with Wolter type i mirror optics

AIP Conference Proceedings (2016) 1696
DOI: 10.1063/1.4937503
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Abstract

We constructed a laboratory-size three-dimensional water-window X-ray microscope that combines wide-field transmission X-ray microscopy with tomographic reconstruction techniques. It consists of an electron-impact X-ray source emitting oxygen Kα X-rays, Wolter type I grazing incidence mirror optics, and a back-illuminated CCD for X-ray imaging. A spatial resolution limit better than 1.0 line pairs per micrometer was obtained for two-dimensional transmission images, and 1-μm-scale three-dimensional fine structures were resolved.

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CITATION STYLE

APA

Ohsuka, S., Ohba, A., Onoda, S., Nakamoto, K., Nakano, T., Miyoshi, M., … Hamakubo, T. (2016). Laboratory-size three-dimensional water-window X-ray microscope with Wolter type i mirror optics. In AIP Conference Proceedings (Vol. 1696). American Institute of Physics Inc. https://doi.org/10.1063/1.4937503

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