Fabrication of Components and Systems for Chemical and Biological Microreactors

Abstract

Advances in the development of different microfabrication technologies have by now enabled a status where the industrial fabrication of threedimensional microstructures is possible almost without restrictions in design or material. Microfabrication tools like dry and wet etching processes, LIGA technology, structuring of photosensitive glass, laser micromachining, micro spark erosion as well as improved processes of precision engineering like micro milling enable a cost effective mass production of microreactor components if they are combined with replication techniques like injection molding. The outstanding meaning of these technologies, in particular for their use in chemistry and biotechnology, is that they offer the threedimensional structuring of a wide variety of materials such as metals, polymers, glasses and ceramics. Numerous microreactor components are presently available on a prototype stage, e.g. micromixers, microextractors micro reaction chambers, miniaturized heat exchangers, membrane units and micropumps. All these devices can easily be combined to microreactors adapted to the specific purpose of the respective chemical reactions. In addition, a number of micro- and nanosensors as well as sensor arrays exist which can be integrated into microreaction systems for process control or parallel analysis in high throughput screening.