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Book Chapter

Characterization of Hydrogen-Free and Hydrogenated DLC Films

  • Harigai T
  • Imai T
  • Takikawa H
  • et al.
Springer Singapore, (2021), 55-69
DOI: 10.1007/978-981-15-7610-2_3
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Harigai, T., Imai, T., Takikawa, H., Kaneko, S., Kunitsugu, S., Niibe, M., … Kamiya, M. (2021). Characterization of Hydrogen-Free and Hydrogenated DLC Films. In Carbon Related Materials (pp. 55–69). Springer Singapore. https://doi.org/10.1007/978-981-15-7610-2_3

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